Menz – Microsystem Technology

• Material (slides) provided by the Teacher
• eLearning material based on two European projects: EduNano and NanoEl Asia Access credentials will be given during the course
• The didactic material (slides for the lectures) will be distributed by teachers. Suggested but not mandatory books will be specified by the teacher. Among them:

Argomenti del programma: Physics of technological processes/Design of microsystems (Design of microsystems) - Introduction to the modeling and the use of CAD for microsystems (1 ECTS); - Modeling and interaction between different physical domains (1 ECTS); - Finite Element Modeling, introduction to COMSOL (1 ECTS); - Guided Development in laboratory of some examples of microsystems (1 ECTS); - Self-Development and design of a microsystem,…

• Mel M. Schwartz. Composite Materials, Volume I: Properties, Non-Destructive Testing, and Repair, Prentice Hall

Argomenti del programma: The course will aim at describing: - microstructure, properties, and specific characterization methods for fiber-reinforced plastics (FRP), with an emphasis on high-performance polymer matrixes reinforced with continuous fibers (4,5 CFU); - microstructure and properties of ceramic matrix composites (CMC) (0,5 CFU); - semiconductor materials and related manufacturing techniques (2 CFU).

• The didactic material (slides for the lectures) will be distributed by teachers. Suggested but not mandatory books will be specified by the teacher. Among them:

Argomenti del programma: Advanced microsystems and LABS Integrated Circuits technologies (wafer preparation, cleanroom technology, silicon oxidation, epitaxy, CVD, evaporation, sputtering, electroplating, diffusion, ion implantation) (2 ECTS) Lithographic techniques, wet etching, dry etching, back-end technologies, CMOS process flow (2 ECTS) Introduction to MEMS and NEMS, bulk micromachining, surface micromachining, LIGA, wafer bonding,…

• The didactic material (slides for the lectures) will be distributed in pdf format by the teacher and uploaded on the Didactic Portal before the course start.

Argomenti del programma: First module – MEMS devices (23 hours): • Micro pressure sensors (2,5 hrs) • Micro accelerometers (2 hrs) • Acoustic sensors (3 hrs) • Flow sensors (1 hr) • Microfluidic devices (4 hrs) • Chemical sensors (1,5 hrs) • Biosensors (1,5 hrs) • MEMS for biomedical applications (2 hrs) • MEMS for genomic applications (2,5 hrs) • MEMS testing (3 hrs) Second module – Advanced technologies (37 hours): • Advanced…

• The didactic material (slides for the lectures) will be distributed in pdf format by the teacher and uploaded on the Didactic Portal before the course start.

Argomenti del programma: Integrated Circuits technologies (wafer preparation, cleanroom technology, silicon oxidation, epitaxy, CVD, evaporation, sputtering, electroplating, diffusion, ion implantation) (2 ECTS) Lithographic techniques, wet etching, dry etching, back-end technologies, CMOS process flow (2 ECTS) Introduction to MEMS and NEMS, bulk micromachining, surface micromachining, LIGA, wafer bonding, MEMS packaging, MEMS complementary…

• Material (slides) provided by the Teacher
• eLearning material based on two European projects: EduNano and NanoEl Asia Access credentials will be given during the course
• The didactic material (slides for the lectures) will be distributed by teachers. Suggested but not mandatory books will be specified by the teacher. Among them:

Argomenti del programma: Physics of technological processes/Design of microsystems (Design of microsystems) - Introduction to the modeling and the use of CAD for microsystems (1 ECTS); - Modeling and interaction between different physical domains (1 ECTS); - Finite Element Modeling, introduction to COMSOL (1 ECTS); - Guided Development in laboratory of some examples of microsystems (1 ECTS); - Self-Development and design of a microsystem,…

• The didactic material (slides for the lectures) will be distributed in pdf format by the teachers and uploaded on the Didactic Portal before the course start. Some optional additive readings (i.e.

Argomenti del programma: Micro and nano-scale technologies (30 h): ● Substrate preparation and crystallography (1,5 h) ● Cleanroom technology (1,5 h) ● Silicon oxidation (1,5 h) ● Epitaxy (VPE, LPE, MBE, CBE), CVD (APCVD, LPCVD, PECVD, MOCVD, ICPCVD), ALD, PVD (evaporation, sputtering), electroplating (6 h) ● Doping by diffusion and by ion implantation (3 h) ● Lithography (optical, e-beam, SPM) and advanced lithography (EUV, NIL, block…