Marc – Fundamentals of Microfabrication and Nanotechnology
Libro adottato a Politecnico di Milano, a.a. 2026/2027 · 5 canali
«Marc – Fundamentals of Microfabrication and Nanotechnology» è adottato per Advanced Micro And Nanofabrication Technologies dal prof. Daniela Petti (Engineering Physics, Ingegneria Fisica, Materials Engineering and Nanotechnology e altri corsi – Politecnico di Milano); per Imaging And Fabrication Of Micro And Nanostructures (C.I.) dal prof. Daniela Petti (Engineering Physics – Politecnico di Milano).
Marc – Fundamentals of Microfabrication and NanotechnologyCerca su Amazon ›
Come lo indica il docente: Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology - vol. 2, CRC Press, Anno edizione: 2011, ISBN: 978-0849331800 Note: (Part II of the course)
Marc – Fundamentals of Microfabrication and Nanotechnologyquesto libroCerca su Amazon ›Verificato sulla scheda ufficiale il 03/10/2026
Bacheca del docente: cosa indica di studiare
Argomenti del programma: Part I - Deposition Introduction: objectives, examples. Vacuum technology: pressure, gas transport, vacuum systems. Surface thermodynamics: surface properties, nucleation, and film growth modes. Film epitaxy: mechanisms and the effect of strain. Thermal evaporation: vapour pressure, deposition rate, and uniformity; electrical and e-beam evaporation, molecular beam epitaxy, pulsed laser deposition.
Marc – Fundamentals of Microfabrication and Nanotechnologyquesto libroCerca su Amazon ›Verificato sulla scheda ufficiale il 03/10/2026
Bacheca del docente: cosa indica di studiare
Argomenti del programma: Part I - Deposition Introduction: objectives, examples. Vacuum technology: pressure, gas transport, vacuum systems. Surface thermodynamics: surface properties, nucleation, and film growth modes. Film epitaxy: mechanisms and the effect of strain. Thermal evaporation: vapour pressure, deposition rate, and uniformity; electrical and e-beam evaporation, molecular beam epitaxy, pulsed laser deposition.
Marc – Fundamentals of Microfabrication and Nanotechnologyquesto libroCerca su Amazon ›Verificato sulla scheda ufficiale il 03/10/2026
Bacheca del docente: cosa indica di studiare
Argomenti del programma: Part I - Deposition Introduction: objectives, examples. Vacuum technology: pressure, gas transport, vacuum systems. Surface thermodynamics: surface properties, nucleation, and film growth modes. Film epitaxy: mechanisms and the effect of strain. Thermal evaporation: vapour pressure, deposition rate, and uniformity; electrical and e-beam evaporation, molecular beam epitaxy, pulsed laser deposition.
Marc – Fundamentals of Microfabrication and Nanotechnologyquesto libroCerca su Amazon ›Verificato sulla scheda ufficiale il 03/10/2026
Bacheca del docente: cosa indica di studiare
Argomenti del programma: Part I - Deposition Introduction: objectives, examples. Vacuum technology: pressure, gas transport, vacuum systems. Surface thermodynamics: surface properties, nucleation, and film growth modes. Film epitaxy: mechanisms and the effect of strain. Thermal evaporation: vapour pressure, deposition rate, and uniformity; electrical and e-beam evaporation, molecular beam epitaxy, pulsed laser deposition.
Marc – Fundamentals of Microfabrication and Nanotechnologyquesto libroCerca su Amazon ›Verificato sulla scheda ufficiale il 03/10/2026
Bacheca del docente: cosa indica di studiare
Argomenti del programma: Part I - Deposition Introduction: objectives, examples. Vacuum technology: pressure, gas transport, vacuum systems. Surface thermodynamics: surface properties, nucleation, and film growth modes. Film epitaxy: mechanisms and the effect of strain. Thermal evaporation: vapour pressure, deposition rate, and uniformity; electrical and e-beam evaporation, molecular beam epitaxy, pulsed laser deposition.
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