Libro adottato a Politecnico di Milano, a.a. 2026/2027 · 4 canali
«Plummer – Integrated Circuit Fabrication» è adottato per Microelectronic Technologies dal prof. Marcello Mariani (Biomedical Engineering, Electronics Engineering, Engineering Physics e altri corsi – Politecnico di Milano).
Come lo indica il docente: Plummer, J. D.; Griffin, P. B., Integrated Circuit Fabrication: Science and Technology., Cambridge University Press., Anno edizione: 2023
Argomenti del programma: Introduction -Semiconductor industry history -Semiconductor physics review Process flow (1) -Process flow for a CMOS device Silicon - Crystallography review (Bravais lattice, crystalline structures) -Silicon lattice - Defects and thermodynamics of point defects -Mono-crystalline silicon growth (CZ) -Silicon wafer fabrication process Silicon oxidation - Silicon oxide structure - Deal and Grove model -Oxidation…
Argomenti del programma: Introduction -Semiconductor industry history -Semiconductor physics review Process flow (1) -Process flow for a CMOS device Silicon - Crystallography review (Bravais lattice, crystalline structures) -Silicon lattice - Defects and thermodynamics of point defects -Mono-crystalline silicon growth (CZ) -Silicon wafer fabrication process Silicon oxidation - Silicon oxide structure - Deal and Grove model -Oxidation…
Argomenti del programma: Introduction -Semiconductor industry history -Semiconductor physics review Process flow (1) -Process flow for a CMOS device Silicon - Crystallography review (Bravais lattice, crystalline structures) -Silicon lattice - Defects and thermodynamics of point defects -Mono-crystalline silicon growth (CZ) -Silicon wafer fabrication process Silicon oxidation - Silicon oxide structure - Deal and Grove model -Oxidation…
Argomenti del programma: Introduction -Semiconductor industry history -Semiconductor physics review Process flow (1) -Process flow for a CMOS device Silicon - Crystallography review (Bravais lattice, crystalline structures) -Silicon lattice - Defects and thermodynamics of point defects -Mono-crystalline silicon growth (CZ) -Silicon wafer fabrication process Silicon oxidation - Silicon oxide structure - Deal and Grove model -Oxidation…
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